Fastmicro Sample Scanner

The Fastmicro Sample Scanner is an inspection tool for indirect measurement of surface particle contamination down to 0.5 micrometer particles using innovative 'tape-lift' samplers. These samplers or PMC cards facilitate flexible sampling on a variety of surfaces, including those that are difficult to reach or are unusually rough, without leaving any measurable residue. Quick and efficient, the scanner analyzes samples within seconds over a sample area of 225 mm², ensuring immediate and accurate results.

The versatility of the Sample Scanner is enhanced with different sampler options, including the card sampler holder for indirect measurements and the 2” wafer holder for fallout measurements. This adaptability makes it suitable to test diverse situations across various industries, providing robust measurements and valuable insights into contamination levels.

''Fastmicro has transformed our inspection capability business significantly. Before migration to this new inspection tool, we saw a 50% variation in the particle count measurements. This is now reduced to less than 10% in combination with a particle detection limit that went down significantly by more than one order of magnitude to 0.5 micrometer. We have confidence in the Fastmicro scanner to help us with finding an excellent quantification of the surface cleanliness of critical parts.

As valued customer, I know that the integration of Fastmicro, has allowed us to reach our required machine defectivity performance.

Besides accurate measurements, the tool offers ease of use and high throughput features. We appreciate the professional service and collaboration with Fastmicro to extend the capabilities of the tool further in the future''

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Dr. Ir. L.H.A. Leunissen | ASML , cleanliness project manager