EU-Japan Semicon Matching

16–19 Dec 2025 | Tokyo, Japan

HomeAgenda
Register
Register
Register

ProductUpdated on 6 November 2025

MCT 200 / MCT 300

Chief Sales & Marketing Officer at Obducat

Lund, Sweden

About

Overview

The MCT 200 / MCT 300 are fully-automated “micro-cluster track” (MCT) tools for coating & developing processes, designed for both R&D and high-volume manufacturing (HVM) applications. They support substrate sizes from 2″ up to 12″ Ø, or square substrates up to 9″×9″ in the standard versions.

Key Features

  • High reliability, uptime and yield for HVM contexts.

  • Highly configurable: standard I/O station plus linear-track robot, and up to 10 modules for coating, developing and thermal processing.

  • Coating module options include the open process bowl and optionally the patented RCCT™ (Rotating Covered Chuck Technology) for improved resist uniformity on challenging substrates.

  • Developing modules support both puddle and spray processes. Thermal processing modules support stacks of up to 8 temperature plates (hot/cool/HMDS vapor priming) and hot plates up to ~300 °C (optionally higher).

  • Interfaces and connectivity: Windows-based control, large touch screen, unlimited recipe storage, USB, Ethernet connectivity, periodic batch & parameter tracking.

Applications

The MCT 200 / 300 systems are suited for advanced micro-fabrication environments, including:

  • LED and display manufacturing

  • SiC components and 5G modules

  • MEMS, opto-electronic, photonic devices

  • Advanced packaging and other semiconductor process flows where high throughput and high uniformity are required.

Looking for

  • Research & Development partner / 研究開発パートナー
  • Manufacturing partner / 製造事業パートナー

Applies to

  • Industrial Applications / 産業用アプリケーション
  • Healthcare / ヘルスケア
  • Energy Sector / エネルギー分野

Organisation

Obducat

EU Business Hub ー 中小企業・スタートアップ / SME/startup

Lund, Sweden

Similar opportunities

  • Product

    MCT200/MCT300 WET

    • Other / その他
    • Healthcare / ヘルスケア
    • Energy Sector / エネルギー分野
    • Manufacturing partner / 製造事業パートナー
    • Industrial Applications / 産業用アプリケーション
    • Distribution partner / ディストリビューションパートナー
    • Research & Development partner / 研究開発パートナー

    Xavier Torres-Tuset

    Chief Sales & Marketing Officer at Obducat

    Lund, Sweden

  • Product

    MCT WET Large Substrates

    • Other / その他
    • Other / その他
    • Healthcare / ヘルスケア
    • Energy Sector / エネルギー分野
    • Manufacturing partner / 製造事業パートナー
    • Industrial Applications / 産業用アプリケーション
    • Research & Development partner / 研究開発パートナー

    Xavier Torres-Tuset

    Chief Sales & Marketing Officer at Obducat

    Lund, Sweden

  • Product

    MCT Large Substrates

    • Other / その他
    • Healthcare / ヘルスケア
    • Energy Sector / エネルギー分野
    • Manufacturing partner / 製造事業パートナー
    • Industrial Applications / 産業用アプリケーション
    • Distribution partner / ディストリビューションパートナー
    • Research & Development partner / 研究開発パートナー

    Xavier Torres-Tuset

    Chief Sales & Marketing Officer at Obducat

    Lund, Sweden