Inteleg® S IM

Inteleg® S IM reacts instantly to minute composition changes and trace amounts of contamination in the base vacuum and sensitive process environments.

Real-time vacuum and process quality monitoring, pump-down monitoring, process condition recognition, leak/contamination detection, and fast feedback control help to prevent scrap and maximise yield.

Inteleg® S IM operates without requiring pumping systems for analyses at typical PVD and CVD process pressures. Its 7-decade-wide operating range accommodates various advanced thin film deposition and vacuum-plasma treatment processes.

At the heart of the Inteleg® S IM is a miniature dual power DC-MFAC plasma reactor. The reactor design ensures high reliability, detection limits down to the ppm levels, low maintenance and a low cost of ownership.