Inteleg® 2B-PEM®

Inteleg® is a family of Industry 4.0-aligned cyber-physical systems that provide 24/7 monitoring, feedback-based control, and optimisation of physical processes. The Inteleg® 2B-PEM® systems are used in smart factories to enable highly efficient and reproducible plasma-based processing, thin film deposition, OES plasma analysis and process development. Inteleg® 2B-PEM® systems provide a continuous stream of high-quality data at the scale required for autonomously operating materials discovery platforms based on Bayesian optimisers.

2B-PEM® is an advanced, OES-based monitoring and control technology that brings significant process enhancements, such as higher deposition rates (e.g. 2 to 4 times) and improved thin film properties (e.g. n, k, rho). 2B-PEM® allows monitoring and controlling of multiple reactive gases (e.g. O2 and N2, C2H4 and CF4), co- or serial sputtering of dissimilar materials, doping control, process quality assurance and monitoring (e.g. detection of substrate outgassing, air/water leaks), as well as reduction in the number of arcs and micro \& macro defects.