I-Photonics MERIDIAN Plasma assisted long throw reactive sputtering coater

Vacuum system Meridian is designed for high-rate deposition of high-precision optical coatings for a wide range of applications. Meridian system helps to obtain thin films of a variety of materials with high accuracy and excellent quality. Optical control allows to make the processes fully automatic and increase the yield significantly. 

Key benefits:

• Long throw sputtering configuration enabling particle free coating processes

• Sputter-Up configuration

• High-yield dual-magnetron AC sputtering systems

• Long life RF plasma sources for precleaning and assisting

• On-substrate direct Optical monitoring system I-Photonics OCP

• Double rotation planetary substrate holder allows mounting of different substrate sizes (200, 250 and 300mm)

Applications:

• Ultra narrow band pass filters

• Multizone filters

• Steep-edge filters

• Single- and multi-notch filters

• Laser mirrors

• Thin-film polarizers

• Beam splitters