Biochips, microfluidic flow cells

IMT is one of the pioneers in the area of microfluidic glass components and biochips. As early as 1990, our technology allowed for the development of the first µTAS chip by Andreas Manz.
The combination of automated semiconductor processes with existing MEMS technology opens up brand-new possibilities for our customers.
There are even new fields of application in cost-sensitive areas, in which it has not previously been possible to consider optical glass.

• Lab-on-a-chip

• DNA analysis

• Microreactors

• Droplet generators

• Impedance chips

• Organ-on-a-chip

• Micro-, nano-arrays

• Single cell detection

• High throughput screening

Etched microchannels, bores (TGV), structured metal and dielectric coatings, electronic conductors (electrodes), optical gratings, concave structures (dot arrays) and planar waveguides

Substrate: Fused silica, B270, Borofloat, D263, other materials on request
Thickness: 0.3 mm–10 mm
Structure sizes: ≥ 2 µm
Tolerance: ±0.5 µm
Position accuracy: < ±0.5 µm